解决方案

案例展示

  • 汽车制造
    • 脱脂液过滤
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    • 循环水过滤
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    • 面漆过滤
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    • 热水洗过滤
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    • 汽车涂装过滤应用
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  • 食品饮料
    • 压缩气过滤
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    • 罐顶呼吸过滤
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    • CIP清洗过滤
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    • 洗瓶水过滤
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    • 发酵过滤
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    • 水过滤
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  • 化工产业
    • 树脂过滤
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    • 人造合成纤维
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    • 聚碳酸酯生产过滤
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    • 过氧化氢过滤
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    • 聚氨酯生产进程
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    • 尼龙生产
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    • 乙二醇生产
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    • 乙烯生产
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    • 聚丙烯生产
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  • 水处理
    • 饮用水过滤
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    • 锅炉补给水处理
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    • 凝结水净化
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    • 冷却水回用
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  • 石油开采与炼化
    • 天然气脱水
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    • 胺液过滤
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    • 进口气体分离
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    • 润滑油过滤
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    • 产成水过滤
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    • 完井液过滤
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    • 注井水过滤
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  • 电子工业
    • 超纯水处理
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    • 超纯气体处理
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    • 晶圆研磨与切割废水回
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    • 微电子空气过滤
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    • 半导体制造废水
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    • 液晶清洗
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  • 工程案例
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晶圆硅片研磨/切割废水回用

2019-06-15
0次
晶圆硅片研磨/切割废水回用
详细介绍:

过程简述
  制造半导体前,必须将硅转换为晶圆片,晶圆生产包括:晶棒成长、晶棒裁切与检测、外径研磨、切片、圆边、表层研磨、蚀刻、去疵、抛光、清洗及检验包装工序;研磨过程之后需采用大量的超纯水来洗净晶圆表面所残留的悬浮微颗粒或金属离子污染物,因而产生CMP研磨废液及后段清洗废水。
  问题描述
  废水处理不当或直接排放会污染环境
  处理水不加以回收造成水资源浪费
  传统处理方式有局限(占地大,加药多,污泥产生量多,水质不稳定)
  产品应用
  上层清液溢流至中间水箱,经中间水泵将清水增压后进一步的过滤,经过10微米的袋式过滤器、1微米的滤芯式过滤器、活性炭吸附装置及终端0.2微米的精密过滤器,之后进入末端水箱,经末端送水泵将系统完全处理的回用水送至超滤产水箱,可直接进反渗透装置以继续生产超纯水;上述过程亦可采用陶瓷膜微滤装置对上清液作过滤浓缩处理。
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